High laser induced damage threshold photoresists for nano-imprint and 3D multi-photon lithography
Kabouraki, E., Melissinaki, V., Yadav, A., Melninkaitis, A., Tourlouki, K., Tachtsidis, T., Kehagias, N., Barmparis, G., Papazoglou, D., Rafailov, E. & Farsari, M.