A stand-alone compact EUV microscope based on gas-puff target source

Torrisi, A.; P. Wachulak, L. Wegrzynski, T. Fok, A. Bartnik, T. Parkman, S. Vondrova, J. Turnova, B. Jankiewicz, B. Bartosewicz, H. Fiedorowicz
J. Microsc. 264, 251
2017
Peer reviewed publication
http://dx.doi.org/10.1111/jmi.12494
no
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